XS-Series

The XS-platform series is a small-footprint high-resolution automated X-ray inspection system concept designed for sophisticated high-speed inspection of semiconductor samples, wire bonds and PCB-assembly boards for single/multipanels or samples in trays. The inspectable applications range from component level inspection to mid-sized SMT boards.

• High speed AXI system with minimum footprint for inline setups
• Microfocus / Submicron X-ray tube (sealed tube / maintenance free)
• Resolution down to <1µm
• Multiple programmable motion system with servo drives
• Digital CMOS flatpanel detector
• Automatic grey-level and geometrical calibration
• Full product traceability via customized MES-Interface

• Same-side load/unload configuration
• Barcode scanner for serial number and product type selection
• Auto BCR scanning station (x-y gantry)
• Low dose radiation filter

• SMT setup for component and solder-joint inspection on PCB, hybrid or chip level assembly processes
• Semi-Backend setup for semiconductor applications, wire bond Test (pre & post), light & complex PCB’s and flex circuits

• XS-2 Transmission (2D) + SFT™
• XS-2.5 Transmission (2D) + SFT™ + Off-Axis (2.5D)
• XS-3 Transmission (2D) + SFT™ + Off-Axis (2.5D) + 3D SART